![PDF] Thermal IR Detection With Nanoelectromechanical Silicon Nitride Trampoline Resonators | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/932d66ab1bb60444f1c159f2e5d30ed18b2dac9e/2-Figure1-1.png "PDF] Thermal IR Detection With Nanoelectromechanical Silicon Nitride Trampoline Resonators | Semantic Scholar")
PDF] Thermal IR Detection With Nanoelectromechanical Silicon Nitride Trampoline Resonators | Semantic Scholar
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